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7h28m(Jan 18, 2026 01:00 AM UTC)
$100.00 USD
Incremento dell'offertaAsta online, soggetta a conferma del venditore
Località:
Gilroy, California, USASoggetto ad un'estensione automatica della scadenza dell'asta.
Potenziale offerta errata
BOC Edwards
TCS-S
23288-1683
Usato/Vedi descrizione
The Edwards Thermal Processing Unit (TPU) was the first mass produced hybrid abatement system capable of abating greenhouse gases. Like its sister product, the Edwards Thermal Conditioning System (TCS), the TPU cabinet houses both a combustion (burn) and wet scrubber. By adding an Oxygen supply to the unit, the combustion temperature is elevated to enable the TPU to crack the greenhouses gases like C2F6, NF3, and SF6, which are commonly used for chamber cleaning in the harshest of semiconductor applications such as PECVD.
The TPU can be configured with 1-4 inlets and can handle up to 200 SLM of gas flow. It is typically integrated into the parent tool or chambers control system such that Oxygen is only consumed when the unit is required to be in high fire mode for PFC abatement.
Trillium provides end users with refurbished TPUs, spare parts and on-site service to improve system reliability and uptime.
Removed from working use
Sold as-is, with no warranties or guarantees.
Assistance available for loading at pickup.
Please feel free to contact us with any questions.
PAYMENT
If you are the winning bidder, you will facilitate payment by referring to the My Bids section of your account.SALES TAX
When applicable, sales tax is calculated based upon the auction’s advertised location.***SHIPPING IS NOT AVAILABLE***
The buyer is responsible for all aspects of pick-up / removal, including but not limited to packing, loading, transportation and exporting. Note: Shipping is NOT available.
CALL THE FOLLOWING NUMBER WITH SPECIFIC QUESTIONS REGARDING ITEMS:
DJ SMITH
(808) 649-0700
dj@factorx.com
Freight recommendation: Shannon Donahue
FreightCenter National Account Manager at 800 - 716 - 7608 Ext. 1003
Removal is by appointment only. All items must be picked-up / removed within 10 (ten) business days from auction closure, unless otherwise stated in the asset description. If any item(s) is not removed within the allotted timeframe, the item(s) may be declared abandoned.
At the time of pick-up / removal, you will be required to present the seller with a copy of your Buyer’s Certificate and/or bill of sale, and potentially other documentation (e.g., copy of driver's license, Authorization of Release, etc). When making a removal appointment, please confirm with the seller what is needed to release the item(s).
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