Nikon
NSR-2205i11D
1995
29518-2
已使用/请参阅说明
Hard Drive is included.
Illumination WL: i-line
Illumination uniformity: 2.00%
or CD unifotmity: 400nm
Overlay (single machine): 70nm
Wafer capacity: 3"/2"
Reticle compatibility: Available
Reticle size: 6"
Lens reduction: 1/5
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