Evatec
Solaris S151
20948-279
已使用/请参阅说明
Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length
Maximum thickness: 2 mm
Capacity (depending on configuration and layer structure): up to 1200 substrates per hour
Cycle time: < 3 seconds
Dimensions and weight of the system:
Main system dimensions: L × W × H [cm] = 335 × 225 × 155
Main system weight: 3.3 t
Media supply:
Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen
High voltage
Compressed air
Cooling water
USED, IN GOOD VISUAL CONDITION, NOT TESTED.
Packing and preparation for shipment available upon request.