描述
| Manufacturer | Alcatel |
| Model | SCM 600 |
| Condition | Used/See Description |
| Lot Number | 20948-288 |
Technical Specifications:
Process: Physical Vapor Deposition (PVD) via Magnetron Sputtering.
Chamber & Loading: Semi-automatic load-lock system for sample introduction.
Power Sources: Equipped with 3 power generators (2x RF 13.56 MHz and 1x DC).
Substrate Capability: Compatible with 4-inch or 6-inch wafers/substrates.
Configuration: 4-target capacity.
Versatility: RF power can be coupled to either the target or the substrate.
Vacuum System: Includes 3 primary pumps and a cryogenic pump.
Included: Main electrical cabinet and control units.
Condition:
Functional Frame: The mechanical and vacuum components of the system are functional.
USED, IN GOOD VISUAL CONDITION, NOT TESTED.
Packing and preparation for shipment available upon request.
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