Nextral NE 550 – Advanced RIE System with Laser End-Point Detection

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Białogard, Zachodniopomorskie, POL

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描述

Nextral NE 550 – Advanced RIE System with Laser End-Point Detection
Key Technical Specifications:

Chamber & Cathode: Features a large 43 cm diameter cathode covered with a high-purity quartz plate.

Power System: 1200W RF Generator (13.56 MHz) with automatic impedance matching (Auto Load & Tune).

Anode: Located on the chamber lid (grounded) and serves as the reactive gas injection system.

Cooling System: Cathode and turbo pump are cooled via a dedicated chiller using specialized coolant (Galden type).

Vacuum System: * Turbo-molecular pump for high vacuum.

Primary backing pump integrated into the frame (utilizing Alcatel AL 300 oil).

Automatic pressure and gas regulation.

Advanced Features & Control:

End-Point Detection: Equipped with a Laser Diode (677.3 nm) for real-time etching depth monitoring and precise process termination.

Software Control: Operated via PC with NAPS software, allowing for full parameter management, recipe creation, and real-time process tracking on screen.

Condition & Logistics:

Status: Complete system with all integrated subsystems (chiller, pumps, control PC).
USED, IN GOOD VISUAL CONDITION, NOT TESTED.

Packing and preparation for shipment available upon request.

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Items offered for sale are sold “as is / where is” subject to sale terms and conditions. Most items are used and may contain defects. Bidders may inspect the property prior to bidding. Inspection is by appointment only. Please use the 'Ask your question' feature to schedule an appointment for Inspection. Any items that can sometimes be seen in the distance in the pictures, but are not described nor attached to the listed item are not the subject of sale.

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Items may be removed by appointment only. All items must be removed within the removal period stated on the event page. The Buyer is responsible for all arrangements and work related to the removal of the assets unless otherwise stated and must adhere to the site-specific health and safety requirements. LSI or any of its group of companies does not act as shipper or exporter of record without its express consent.
For EU located assets, non-EU buyers need to engage a customs broker / freight forwarder if exporting assets outside of the EU.
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If asset is located outside of UK or EU, bidders should adapt clause above accordingly.

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