Advantest
F5112
2001
710000882
29518-3
已使用/请参阅说明
Accelaration voltage: 50 kV
Field size: 1600 μm x800 μm
Beam current: 3.5 μA
Beam size: 4 μm x4 μm variable shaped beam
Scanning speed: 8 MHz
Stitching accuracy: 45 nm
Overlay accuracy: 45 nm
Substrate size: 3 inch
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