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Location:
Cardiff, GBRRemoval & Shipping:
Buyer Must Arrange. See details.
VISITORS: 3
Taxes
To be added at payment
Buyer's Premium
18%
Seller's Terms & Conditions
Event
ASM
E2000
880110
27108-2
Used/See Description
North 1
Serial Number : 880110
System Type : E2000
Supply Voltage/ Freq : 480/ 50
System Hand : Left Hand
Monitor Type : Flat Panel
Wafer Size : 200mm
Maint Console : Mini Maint
CPU : 68040
Software Version : 7.65
Comms : HSMS
RP/ ATM : RP
Vacuum Load Locks : No
WHC Gate Valve : Swing
WHC Robot Arm : Wide
Reactor Isolation : HVA
ATM Valve : VAT
Pressure Controller : MKS 152 Analogue
PCV Type : MKS 253B
Choke Valve : Yes
RP Orientation : Bottom Feed
Gas Panel Orientation : Top Feed
Main H2/N2 : 100slm
Cross Purge Valves : Yes
Dep/ Vent Transition Valves : Yes
ATM/RP Vent : Yes
Shaft MFC : 5slm
P Dopant Loop : Yes
P loop MFC's Dil/SRC/INJ : 20slm/175/175
N Dopant Loop : Yes Teed PH3/ AsH3
N loop MFC's Dil/SRC/INJ : 20slm/175/175
Aux1 : SiH2Cl2 500sccm
Aux2 : SiH4 105sccm
Aux3 : None
Aux4 : GeH4 2000sccm
Aux5 : GeH4 175sccm
HCL Hi : Yes 20slm
HCl Low : Yes 1000sccm
Precision Vent Matching : Yes
TCS : 25gpm LVC
DCS Cabinet : Yes
TCS Mini Bubbler : 10L LPE
Gas Detection : Gastec H2/ HCl
Temperature Controller : Foxboro
Analog Ratio Control : Yes
Dual Ratio : No
Inspection Items offered for sale are sold “as is / where is” subject to sale terms and conditions. Most items are used and may contain defects. Bidders may inspect the property prior to bidding. Inspection is by appointment only. Please use the 'Ask your question' feature to schedule an appointment for Inspection.
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Items may be removed by appointment only. All items must be removed within the removal period stated on the event page. The Buyer is responsible for all arrangements and work related to the removal of the assets unless otherwise stated and must adhere to the site-specific health and safety requirements. LSI or any of its group of companies does not act as shipper or exporter of record without its express consent. For EU located assets, non-EU buyers need to engage a customs broker /freight forwarder if exporting assets outside of the EU. For UK located assets, non-UK buyers need to engage a customs broker /freight forwarder if exporting assets outside of the UK. If asset is located outside of UK or EU, bidders should adapt clause above accordingly.
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Please note: If you are the winning bidder and default on your purchase in any way, your account may be locked, and you will be unable to bid on future sales. Please familiarise yourself with the event’s specific terms & conditions.
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