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ASM E2000 Silicon Epitaxial Reactor
Cardiff, GBR
Event ID #:GI-Event 27996
Lot#: 27108-4
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Applied Engineering CCM 601 , Multi Wire Contactin...
Białogard, Zachodniopomorskie, POL
Lot#: 20948-18
Lot#: 27108-2
Lot#: 27108-5
IQE Silicon Epitaxial Wafer Fab Equpiment
Lot#: 27108-1
Lot#: 27108-3
Fairchild Convac FM 6000 , Wafer coater ,
Lot#: 20948-244
AMICRA SDB 1000 , Flip Chip Bonder , high accuracy...
Lot#: 20948-17
Heidelberg Instruments DWL 200 , Laser , Gencobot ...
Lot#: 20948-243
Nissin 'Exceed 2000' Ion Implanter
Hachioji-shi, Tokyo, JPN
Event ID #:GI-Event 29324
Lot#: 29518-4
Ulvac 'NE-700' Dry Etching System (1998)
Lot#: 29518-6
Screen 'D-spin' Coater
Lot#: 29518-10
Plasma-Therm 'SLR Series' PCVD
Lot#: 29518-8
Samco 'RIE-10NR' Etcher (1988)
Lot#: 29518-7
SPTS Technologies 'APM-011' InP ICP Etcher (2016)
Lot#: 29518-5
Nikon 'NSR-2205i11D' Stepper System
Lot#: 29518-1
Lot#: 29518-2
Advantest 'F5112' E-BEAM Lithography System (2001)
Lot#: 29518-3
PCVD
Lot#: 29518-26
Evatec Solaris S151 Multi Chamber Sputtering Sys...
Lot#: 20948-279
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