Taiyo Nippon Sanso 'HR4469G' MOCVD Epitaxy System (2023)
Sales/Lot Type:
Make Offer
Location:
Sagamihara, Kanagawa, JPNRemoval & Shipping:
Buyer Must Arrange. See details.
VISITORS: 35
Taxes
To be added at payment
Buyer's Premium
18%
Seller's Terms & Conditions
Event
Description
| Manufacturer | Taiyo Nippon Sanso |
| Model | HR4469G |
| Year of Manufacture | 2023 |
| Serial Number | 15Q189A-00 |
| Condition | Used/See Description |
| Lot Number | 29518-39 |
MOCVD Epitaxy System, Maker Taiyo Nippon Sanso, Model HR4469G, S/N 15Q189A-00, YoM 2023;
1. Overview
The HR4469G is a high-performance MOCVD system designed for epitaxial growth of III-V
compound semiconductors. It is equipped with a horizontal reactor for processing one
4-inch wafer under reduced pressure.
The system integrates gas supply, heating, vacuum exhaust, safety interlock, and
computer-based control systems.
2. Key Features
- Horizontal quartz reactor (HR4000 type)
- Automatic wafer transfer with glove box and pass box
- Comprehensive safety system compliant with High Pressure Gas Safety Act (Japan)
- Total system supply including gas handling, vacuum, and control technologies
3. System Configuration
Standard configuration includes raw material supply control systems (organometallic and
hydride gases), RF induction heating, vacuum exhaust systems, safety interlocks, and
PLC-based control systems.
4. Reactor / Glove Box
Water-cooled horizontal quartz reactor HR4000 for single 4-inch wafer processing. Reaction
temperature range: 450‒1000°C. Rotary graphite susceptor with SiC coating.
Automatic wafer loading/unloading via load-lock chamber with turbo molecular pumping
system.
5. Heating System
RF induction heating system (approx. 30 kW) with PID temperature control. Temperature
stability ±0.5°C.
6. Vacuum Exhaust System
Dry pump system for process exhaust and turbo molecular pump for high-vacuum
operations. Automatic pressure control via proportional control valves.
7. Safety System
Monitoring of toxic/flammable gas leakage, earthquake, abnormal pressure and
temperature. Automatic interlocks trigger safe shutdown, nitrogen purge, or heating stop
as required.
8. Measurement & Control
Touch panel (15-inch TFT), PLC, and dedicated PC for automatic recipe control (up to 200
steps). Data logging in CSV format.
9. Utilities
Refer to “HR4469G Utility Requirement List” for detailed utility specifications.
*** Any offer subject to seller's review and approval. ***
*** Maxet Co., Ltd. supports with disconnection and removal of tools. Maxet is assigned as the exporter if the tools are sold outside of Japan. All related costs incurred shall be borne by the buyer. ***
*** Removal Date: The removal will be settled between November and early December 2026. ***
1. Overview
The HR4469G is a high-performance MOCVD system designed for epitaxial growth of III-V
compound semiconductors. It is equipped with a horizontal reactor for processing one
4-inch wafer under reduced pressure.
The system integrates gas supply, heating, vacuum exhaust, safety interlock, and
computer-based control systems.
2. Key Features
- Horizontal quartz reactor (HR4000 type)
- Automatic wafer transfer with glove box and pass box
- Comprehensive safety system compliant with High Pressure Gas Safety Act (Japan)
- Total system supply including gas handling, vacuum, and control technologies
3. System Configuration
Standard configuration includes raw material supply control systems (organometallic and
hydride gases), RF induction heating, vacuum exhaust systems, safety interlocks, and
PLC-based control systems.
4. Reactor / Glove Box
Water-cooled horizontal quartz reactor HR4000 for single 4-inch wafer processing. Reaction
temperature range: 450‒1000°C. Rotary graphite susceptor with SiC coating.
Automatic wafer loading/unloading via load-lock chamber with turbo molecular pumping
system.
5. Heating System
RF induction heating system (approx. 30 kW) with PID temperature control. Temperature
stability ±0.5°C.
6. Vacuum Exhaust System
Dry pump system for process exhaust and turbo molecular pump for high-vacuum
operations. Automatic pressure control via proportional control valves.
7. Safety System
Monitoring of toxic/flammable gas leakage, earthquake, abnormal pressure and
temperature. Automatic interlocks trigger safe shutdown, nitrogen purge, or heating stop
as required.
8. Measurement & Control
Touch panel (15-inch TFT), PLC, and dedicated PC for automatic recipe control (up to 200
steps). Data logging in CSV format.
9. Utilities
Refer to “HR4469G Utility Requirement List” for detailed utility specifications.
*** Any offer subject to seller's review and approval. ***
*** Maxet Co., Ltd. supports with disconnection and removal of tools. Maxet is assigned as the exporter if the tools are sold outside of Japan. All related costs incurred shall be borne by the buyer. ***
*** Removal Date: The removal will be settled between November and early December 2026. ***
Q & A
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Inspection
Most items offered for sale are used and may contain defects not immediately detectable. Bidders may inspect the property prior to bidding. Inspection is by appointment only. Please use the 'Ask a Question' feature to schedule an appointment for Inspection.
Payment
Wire Transfer is the only payment option for this item. The Wire Transfer Transaction Summary page will provide payment and account information. The Wire Transfer must be completed within 5 days unless otherwise specified below.
PAYMENT MUST BE MADE ONLINE -- To make online payment, log into your Liquidity Services account and select 'My Bids'. Please follow the instructions there.
Payment in full is due not later than three (3) business days from the time and date of the close of the auction. Payment must be made electronically through the Liquidity Services Website. Payment Methods are listed above.
PAYMENT MUST BE MADE ONLINE -- To make online payment, log into your Liquidity Services account and select 'My Bids'. Please follow the instructions there.
Payment in full is due not later than three (3) business days from the time and date of the close of the auction. Payment must be made electronically through the Liquidity Services Website. Payment Methods are listed above.
TAX EXEMPTION: Where taxes are applicable (see the Buyer's Certificate), Tax Exempt documents must be provided to this Seller within 24 hours of the auctions close and before payment is made. Please use the 'Ask a Question' feature for all questions.
Removal
Property may be removed by appointment only and appointments must be made at least 24 hours in advance. All items must be removed within ten (10) business days from the time and date of the close of the auction.
The Buyer will make all arrangements and perform all work necessary, including packing, loading and transportation of the property. No Assistance will be provided. Bidders will be locked unless a prior arrangement has been made for any item not removed within the ten (10) business days allowed and stated on the Buyer's Certificate.
The Buyer will make all arrangements and perform all work necessary, including packing, loading and transportation of the property. No Assistance will be provided. Bidders will be locked unless a prior arrangement has been made for any item not removed within the ten (10) business days allowed and stated on the Buyer's Certificate.
Removal and Transportation Options
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Special Instructions
NOTICE: If you are the winning bidder and default by failing to adhere to this sellers terms and conditions your account with Liquidity Services WILL BE LOCKED.
Guaranty Waiver. All property is offered for sale 'AS IS, WHERE IS.' The Seller makes no warranty, guaranty or representation of any kind, expressed or implied, as to the merchantability or fitness for any purpose of the property offered for sale. Please note that upon removal of the property, all sales are final.
Description Warranty. Seller warrants to the Buyer that the property offered for sale will conform to its description. Any claim for misdescription must be made prior to removal of the property. If Seller confirms that the property does not conform to the description, Seller will keep the property and refund any money paid. The liability of the seller shall not exceed the actual purchase price of the property.
Guaranty Waiver. All property is offered for sale 'AS IS, WHERE IS.' The Seller makes no warranty, guaranty or representation of any kind, expressed or implied, as to the merchantability or fitness for any purpose of the property offered for sale. Please note that upon removal of the property, all sales are final.
Description Warranty. Seller warrants to the Buyer that the property offered for sale will conform to its description. Any claim for misdescription must be made prior to removal of the property. If Seller confirms that the property does not conform to the description, Seller will keep the property and refund any money paid. The liability of the seller shall not exceed the actual purchase price of the property.
Additional Information
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