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Nissin 'Exceed 2000' Ion Implanter
Hachioji-shi, Tokyo, JPN
Event ID #:GI-Event 29324
Lot#: 29518-4
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Ulvac 'NE-700' Dry Etching System (1998)
Lot#: 29518-6
Screen 'D-spin' Coater
Lot#: 29518-10
Plasma-Therm 'SLR Series' PCVD
Lot#: 29518-8
Samco 'RIE-10NR' Etcher (1988)
Lot#: 29518-7
SPTS Technologies 'APM-011' InP ICP Etcher (2016)
Lot#: 29518-5
Nikon 'NSR-2205i11D' Stepper System
Lot#: 29518-1
Lot#: 29518-2
Advantest 'F5112' E-BEAM Lithography System (2001)
Lot#: 29518-3
PCVD
Lot#: 29518-26
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